(Ebook free) Introductory MEMS: Fabrication and Applications






 | #5172298 in Books |  2014-09-07 |  2014-09-07 | Original language:English | PDF # 1 |  9.25 x1.04 x6.10l,1.41 | File Name: 1489984216 | 444 pages


||From the Back Cover||Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as th

This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.


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