[Download ebook] MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf)






 | #2871046 in Books |  Cenk Acar |  2008-10-23 | Original language:English | PDF # 1 |  9.21 x.63 x6.14l,1.14 | File Name: 0387095357 | 260 pages

 | MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness


|| ||From the reviews:“This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. … The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers.&rd

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design o...


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