| #1500908 in Books | 1998-02-01 | Ingredients: Example Ingredients | Original language:English | PDF # 1 | 9.40 x1.60 x7.60l, | File Name: 0072907223 | 944 pages
||2 of 2 people found the following review helpful.| A good Introduction|By Mike|Written in 1998 the book is getting a little long in the tooth and needs some updating. However the principles of many types of MEMS tranducers are covered as well as the basic process technology. It is probably the still best introduction to MEMS you can buy. The organisational structure of the book make it a good starting reference as each topic i
This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
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You can specify the type of files you want, for your device.Micromachined Transducers Sourcebook | Gregory T. Kovacs. I was recommended this book by a dear friend of mine.