| #1952891 in Books | Simon M Sze | 1994-10 | Original language:English | PDF # 1 | 9.63 x1.25 x6.38l,2.02 | File Name: 0471546097 | 576 pages | Semiconductor Sensors
||0 of 1 people found the following review helpful.| Five Stars|By RAZ|Everything worked out perfect with this order.|From the Publisher|An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
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