[Read free] Dry Etching Technology for Semiconductors






 | #5844025 in Books |  2016-10-28 |  2016-09-10 | Original language:Japanese | PDF # 1 |  9.25 x.30 x6.10l,.43 | File Name: 3319356240 | 116 pages


|| |This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits.  The author describes the devi

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials supplie...


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